| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a thin-film gas sensor which surely degasses a thermally-insulated support layer, prevents a gas from being generated, when a gas selective combustion layer is burned and which prevents expansion and detachment. SOLUTION: The thin-film gas sensor includes a Si substrate 1 having through-holes; the thermally-insulated support layer 2 as a trilaminar structure of a thermally-oxidized layer 21, a CVD-SiN layer 22 and a CVD-SiO<SB>2</SB>layer 23; a heater layer 3; an electrically-insulated layer 4; a pair of sensitive electrode layers 51; a gas sensitive layer 52; and the gas selective combustion layer 53. The manufacturing method of the thin-film gas sensor includes an annealing process for annealing the thermally-insulated support layer 2 and removing a gas, having major component as H<SB>2</SB>gas contained in the CVD-SiN layer 22 and the CVD-SiO<SB>2</SB>layer 23, after the thermally-insulated support layer 2 is formed. COPYRIGHT: (C)2009,JPO&INPIT
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