发明名称 ESR SYSTEM AND ITS TUNING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an ESR system tuning method which enables even a beginner to tune an ESR system in a short time like an expert. SOLUTION: When a tuning operation of the ESR system is started, a reference is made to a past tuning history previously accumulated in a storage means of the ESR system. A resonance frequency; a phase value; and a value of a coupling adjuster for adjusting the degree of coupling between a resonator and a microwave line are searched for from among the past tuning history with prescribed information as a key to select three values most appropriate to a current sample. These values are set in a microwave oscillator; a phase shifter; and the coupling adjuster as initial values of tuning so as to start the tuning operation. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009115577(A) 申请公布日期 2009.05.28
申请号 JP20070288165 申请日期 2007.11.06
申请人 JEOL LTD 发明人 SUZUKI HAJIME
分类号 G01R33/60 主分类号 G01R33/60
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