| 摘要 |
<p>A tube-array showerhead for CVD or PECVD on large substrates delivers precursors to a process chamber via an array of tubes drilled with precision holes The tubes rapidly become contaminated with use and must be changed frequently to maintain process quality An improved manifold tor a tube-array showerhead, intended tor processes with a low pressure differential between the tubes and pioce&s chambci, includes holding-stubs to hold each tube by its ends outside the manifold block At least one holding-stub for each tube is sppng-loaded along the direction of the tube's operating axis Contaminated tubes can be removed, and clean tubes installed, without disassembling the manifolds or disturbing any high-pressure-differential seals to the ambient atmosphere or precursoi supplies This invention reduces production costs by decreasing chamber down-time and reducing the risk of creating leaks when tubes are changed.</p> |
