| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for raising temperature of a chamber, and its heating device. SOLUTION: The method for raising the temperature of the chamber includes a process of heating air in the chamber, and a process of injecting dried air into the chamber to mix the injected air with hot air and exhausting wet air. At the same time, the heating device is provided to raise the temperature in the chamber in a short time, and the cost is effectively suppressed by creating an isothermal environment. COPYRIGHT: (C)2009,JPO&INPIT
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