| 摘要 |
PROBLEM TO BE SOLVED: To provide a barrier film having flexibility, excellent in the gas barrier performance against oxygen, water vapor, etc., also having heat resistance, moisture resistance, and water resistance, and manufacturable easily. SOLUTION: The barrier film has at least such a structure that an organic-inorganic hybrid barrier layer 5 is formed on a high-polymer film base material 1, wherein the hybrid barrier layer 5 contains silicon oxides SiO<SB>x</SB>having particle sizes of 2.0 nm or below which are dispersed uniformly according to the analytical result of an analysis with a field-emission transmission electron microscope (FE-TEM) and energy dispersion type X-ray spectroscopy (EDX), C<SB>5</SB>H<SB>7</SB><SP>+</SP>ions, C<SB>3</SB>H<SB>5</SB>O<SB>2</SB><SP>+</SP>ions, and C<SB>6</SB>H<SB>7</SB><SP>+</SP>ions are detected by a flight time type secondary ion mass-spectometry (TOF-SIMS) while the primary ions are<SP>69</SP>Ga<SP>+</SP>and the primary ion acceleration voltage is 15 kV, and further PVA resin existence is confirmed as a binder. COPYRIGHT: (C)2009,JPO&INPIT
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