SURFACE PROCESSING METHOD

摘要

The invention shows a method of producing high-quality ablation plume by processing a target, on a target body, with a pulsed laser beam radiation, so that the method comprises: selecting a spot area for a beam cross-section on the target to correspond the ablation threshold of the target material to being exceeded throughout the spot area of which the plume is ablated by the pulsed beam radiation within a controlled ablation depth so providing the fine quality plasma, to be used for coating and/or particle synthesis.