| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stripper for color resist, containing no metal ions while suppressing corrosion of metal (especially aluminum), and having excellent color resist strippability. <P>SOLUTION: This stripper for color resist contains water, quaternary ammonium hydroxide [B], alkanolamine [C], trivalent to octavalent polyhydric alcohol [D] and a silane-based compound [A] represented by the following general formula (1), wherein it does not contain a water soluble organic solvent [E] except the polyhydric alcohol or contains it under 30 wt.%, and the upper limit of content of the [B] component is 10 wt.%. [(X<SB>2</SB>N-(CH<SB>2</SB>)<SB>1</SB>-)<SB>m</SB>NH<SB>2</SB>-m-(CH<SB>2</SB>)<SB>k</SB>-]<SB>n</SB>Si(OR)<SB>4-n</SB>(1), wherein 1 is an integer of l-4, m is an integer of 0-2, and n is an integer of 1-3. R is hydrogen or 1-4C alkyl group, and X is hydrogen or 1-4C alkyl group. <P>COPYRIGHT: (C)2009,JPO&INPIT |
