| 摘要 |
PROBLEM TO BE SOLVED: To easily adjust a laser beam to have an ideal beam diameter matched with the pupil diameter of an objective lens at low cost through the use of a compact sensor. SOLUTION: The laser microscope 1 includes: a laser beam source 2; a beam expander 10 for adjusting the beam diameter of the laser beam L<SB>1</SB>emitted from the laser beam source 2; a power meter 13 for detecting the light quantity of the laser beam L<SB>1</SB>whose diameter is adjusted by the beam expander 10; the objective lens 6 for condensing the laser beam L<SB>1</SB>whose diameter is adjusted by the beam expander 10 on a sample A; a diaphragm 12 disposed in a position optically conjugate to the pupil position of the objective lens 6, between the beam expander 10 and the power meter 13, and having an aperture diameter smaller than the beam diameter adjusted by the beam expander 10; and a control part 14 for controlling the beam expander 10 on the basis of the light quantity of the laser beam L<SB>l</SB>detected by the power meter 13 not via the diaphragm 12 and the light quantity of the laser beam L<SB>1</SB>detected by the power meter 13 via the diaphragm 12. COPYRIGHT: (C)2009,JPO&INPIT
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