| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ashing system wherein variations in ashing rate over time are suppressed. <P>SOLUTION: In a passage for oxygen radicals, surfaces to which metal atoms scattered from a substrate W adhere, i.e. an upper internal surface 11a of a chamber 11, a reverse surface of a shower plate 31, and an inner peripheral surface 33a and a bottom surface 33b of a diffusion preventive wall 33 are formed such that the same metal as the one exposed on the substrate W is exposed. <P>COPYRIGHT: (C)2009,JPO&INPIT |
