| 摘要 |
PROBLEM TO BE SOLVED: To provide an analysis system, an analysis method and an analysis processing program, enabling to perform accurate failure analysis. SOLUTION: A plurality of RAMs formed on a semiconductor device use design data and fail data for generating failure bit position data showing failure bit positions and classifying the generated failure bit position data in RAM arranged conditions where failure bit modes or failure bits corresponding thereto exist, or use the generated failure bit position data for regulating the occurrence frequency of the failure bits of each RAM in RAM scales. They use the failure bit position data for displaying a FBM and graphically displaying data obtained by classifying and normalizing processing, in a predetermined form. COPYRIGHT: (C)2009,JPO&INPIT
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