| 摘要 |
PROBLEM TO BE SOLVED: To provide a visual inspection apparatus capable of high-accuracy detection, even if the number of imaging means is reduced. SOLUTION: The visual inspection apparatus for visual inspection of an object to be inspected (C) is provided with an imaging means (3), arranged in such a way as to image the main inspection surface, when the object to be inspected (C) is viewed from a specific direction and is further provided with alteration means (4-7) for altering the direction of light from a sub-inspection surface, in such a way that images of the sub-inspection surface, when the object to be inspected (C) is viewed from a direction different from the specific direction, is captured in the imaging means (3). The visual inspection apparatus is yet further provided with optical path redundancy means (10, 12) for making a second optical path redundant, in order to make the optical path length of the second optical path, from the main inspection surface of the object to be inspected (C) to the imaging means (3) match the optical path length of a first optical path, from the sub-inspection surface of the object to be inspected (C) to the imaging means (3). COPYRIGHT: (C)2009,JPO&INPIT
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