| 摘要 |
<p>Provided is an interferometer which can measure a surface shape of an inspecting object even when a difference between the shape of a surface to be inspected and that of a reference surface is large. The interferometer for measuring the surface shape of an inspecting object (9) is provided with a planar light source having low spatially coherent characteristics; light guide optical systems (6, 8) for arranging the planar light source and the inspecting object in optical conjugation; and an optical detector (13) having a detecting surface arranged at a position optically conjugated with the inspecting object. The planar light source has a plurality of fine planar light sources having low coherency to each other.</p> |
