PROBE CARD AND ELECTRONIC COMPONENT TEST APPARATUS EQUIPPED WITH THE SAME, AND METHOD OF DETERMING CLEANING OF PROBE PIN

摘要

A probe card (30) includes a probe pin (31) to be brought into contact with a pad of an IC device built in a semiconductor wafer, a printed board (32) mounted with the probe pin (31), a connector (33) electrically connected to a test head, and a memory (35) for storing information relevant to the probe card (30).