| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve a vaporizing rate and deposition rate of a MgO vapor deposition material when forming a film with an electron-beam vapor deposition technique. <P>SOLUTION: In a manufacturing method for an MgO vapor deposition material made into a porous sintered compact and whose average pore sizes are set to about 0.1 to 500 μm, a gas is mixed into a slurry containing MgO powder and a solvent, so as to be a raw material, and the raw material is made into a pellet by a sintering process. Alternatively, a foamed material is mixed into a slurry containing MgO powder and a solvent, so as to be a raw material, and the raw material is made into a pellet by a sintering process. Alternatively, an additive generating a gas upon heating is mixed into a slurry containing MgO powder and a solvent, so as to be a raw material, and the raw material is made into a pellet by a sintering process. Alternatively, a powder raw material with a narrow grain size distribution so as to form a gap between the grains is used, and is made into a pellet by a sintering process. <P>COPYRIGHT: (C)2009,JPO&INPIT |
