| 摘要 |
Device for determining the density of a plasma, with of a probe (1) which can be immersed into the plasma, with a probe head (2) in form of a three-axis ellipsoid, and a handle (3) connected to the probe head (2), wherein the probe head (2) has a sheath (4) and a probe core (5, 5a) surrounded by the sheath (4), wherein the surface (8) of the probe core (5, 5a) has electrode areas (9, 10) of opposite polarity which are insulated from each other. The probe core consists of electrodes (6, 7), to which a signal is applied. The absorption of that signal is measured and evaluated as a function of the frequency. Based on a multipole expansion, a mathematical model is constructed with which the absorption spectrum of the probe can be unambiguously evaluated. For a particular design of the probe, the response can be restricted to a single resonance, from which the electron density of the plasma (to be inferred from the resonance frequency) can be found by an unambiguous evaluation algorithm.
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