FLOW BATH, METHOD FOR DISCHARGING SOLID PARTICLE THEREFROM AND METHOD FOR TREATING OBJECT TO BE TREATED

摘要

PROBLEM TO BE SOLVED: To provide a flow bath in which a solid particle in a fluidized bed can be discharged at a constant discharge rate by a solid particle discharging means and the gas in the fluidized bed is hardly made to leak out of the solid particle discharging means and to provide a method for discharging the solid particle from the flow bath and a method for treating the object to be treated by using the flow bath.

SOLUTION: A decomposition tank 10 (being the flow bath) is provided with: the fluidized bed 106 packed with the solid particle; a fluidizing gas chamber 118 arranged in the lower part of the fluidized bed 106 or a dispersion unit 104 arranged in the fluidized bed 106; a fluidizing gas supplying flow passage 30 for supplying a fluidizing gas to the dispersion unit 104; a solid particle discharge unit 114 for discharging the solid particle in the fluidized bed 106; a first hopper 120 arranged at an outlet of the solid particle discharge unit 114; and a gas supplying flow passage 136 for supplying a gas to the first hopper 120. The pressure in the fluidizing gas supplying flow passage 30 immediately in front of the decomposition tank 10 is made equal to the pressure in the first hopper 120.

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