SURFACE EMITTING LASER ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an electrode structure for preventing the collapse of the mesa post of an oxidized layer-constricted VCSEL element. SOLUTION: The VCSEL element 100 has a rectangular-shape current injection region 20a in an oxidized constricted layer 20. An electrode lead wire 30 which is formed on the upper part of the mesa post 50 and connected to a p-side electrode 26 to supply an oscillating current to the mesa post 50 is formed at an angle position corresponding to one of peaks of the rectangular-shape current injection region 20a. Stress to be applied from the p-side electrode lead wire 30 to the mesa post 50 is reduced to prevent the collapse of the mesa post 50 due to the stress of the oxidized constricted layer 20. COPYRIGHT: (C)2009,JPO&INPIT