DEVICE FOR THE PLASMA TREATMENT OF WORKPIECES

摘要

The device is used for the plasma treatment of workpieces. The workpiece is inserted into a chamber (17) of a treatment station, wherein said chamber can be evacuated at least partially. The plasma chamber is delimited by a chamber bottom (29), a chamber cover (31), and a lateral chamber wall (18) and has a positionable gas lance (36). The gas lance is made of a dielectric at least in some regions.