CONVEYANCE ROBOT, LOCALLY CLEANED HOUSING WITH THE CONVEYANCE ROBOT, AND SEMICONDUCTOR MANUFACTURING DEVICE WITH THE HOUSING

摘要

A conveyance robot suitable for mounting on a locally cleaned housing. The conveyance robot has a body (14) having a thin plate (28), a lifting mechanism (20), and a movement unit (48). The thin plate (28) has an upper end located below the lowermost part of a first arm (12) and has a vertical surface provided with a fixation section (49) to which the conveyance robot (8) is fixed in a vertical position. The lifting mechanism (20) is provided on the vertical surface. The movement unit (48) rotatably supports the first arm (12) and can be lifted and lowered by the lifting mechanism (20) along the vertical surface.