发明名称 SYSTEM FOR DISPATCHING SEMICONDUCTORS LOTS
摘要 <p>A system for dispatching a plurality of semiconductor lots among a plurality of tools is provided. The system includes a dispatch server manager and a dispatch integrator and display device. The dispatch integrator and display device conveys a dispatch request to the manager and receives a dispatch list from the manager. The manager queries for a processing status of the plurality of semiconductor lots and displays a dispatch list in response to the processing status. The dispatch list includes an associated reason and/or code related to the processing status.</p>
申请公布号 EP1999664(A4) 申请公布日期 2009.05.27
申请号 EP20070717461 申请日期 2007.01.29
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 DICKSTEIN, ERIC;DZIEDZIC, ALAN;BURDA, RICHARD
分类号 G06F19/00;G07F17/32 主分类号 G06F19/00
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