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发明名称
MASK
摘要
申请公布号
KR20090053421(A)
申请公布日期
2009.05.27
申请号
KR20070120270
申请日期
2007.11.23
申请人
SAMSUNG ELECTRO-MECHANICS CO., LTD.
发明人
MAENG, DUCK YOUNG;CHO, SOON JIN;SEO, YOUN SOO
分类号
G03F1/60;G03F7/12;H01L21/027
主分类号
G03F1/60
代理机构
代理人
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地址
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