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发明名称
EQUIPMENT FOR DIE PICK UP AND METHOD FOR DETATCHING OF SEMICONDUCTOR CHIP USING THE SAME
摘要
申请公布号
KR20090053682(A)
申请公布日期
2009.05.27
申请号
KR20080099249
申请日期
2008.10.09
申请人
HYNIX SEMICONDUCTOR INC.
发明人
JEONG, YUN SEOP;KIM, JONG HYUN;KOH, KWANG DUCK;YOO, SYONG YONG;SHIN, JAE MOO
分类号
H01L21/50
主分类号
H01L21/50
代理机构
代理人
主权项
地址
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