发明名称 ULTRAVIOLET RADIATION PRODUCING APPARATUS
摘要 This invention is to prevent reaction products due to ultraviolet radiation from adhering to the window, to prevent reduction of the intensity of the ultraviolet radiation, and to prevent the formation of debris from the reaction products. <H0> Presentation of Invention </H0> Ultraviolet illumination equipment that has a dielectric-barrier discharge lamp 2 located within a receptacle 1, and a window 3 in the receptacle 1 through which the ultraviolet radiation from the dielectric-barrier discharge lamp 2 is emitted, and that is characterized by establishment of a heating means to heat the window 3 to at least 100 DEG C. <IMAGE>
申请公布号 EP1158574(A4) 申请公布日期 2009.05.27
申请号 EP19990973676 申请日期 1999.10.07
申请人 USHIO DENKI KABUSHIKI KAISYA 发明人 HISHINUMA, NOBUYUKI;SUGAWARA, HIROSHI;TAKEMOTO, FUMITOSHI;TOKAI, HIROAKI;MURASE, JUN
分类号 B08B17/00;G21K5/02;G21K5/04;H01L21/00;H01L21/306 主分类号 B08B17/00
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