DEVICE FOR LIQUID TREATMENT OF DISK-SHAPED OBJECTS,申请号EP20030760646-传众专利搜索

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发明名称	DEVICE FOR LIQUID TREATMENT OF DISK-SHAPED OBJECTS
摘要
申请公布号	EP1532661(B1)	申请公布日期	2009.05.27
申请号	EP20030760646	申请日期	2003.06.18
申请人	SEZ AG	发明人	HOHENWARTER, KARL-HEINZ
分类号	B08B3/02;H01L21/00;G11B5/84;G11B7/26	主分类号	B08B3/02
代理机构		代理人
主权项
地址

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