发明名称 |
UV decomposable molecules and a photopatternable monomolecular film formed therefrom |
摘要 |
[Problem] The invention provides a method of controlling the solid-state property of the solid-phase surface or controlling forming reactive region. The method is attained by using a means ejecting droplets and a molecule for inclusion in a SAM which can be photo-patterned in a short period of time using low energy UV radiation, that is UV radiation having a relatively long wavelength. [Means to Solve the Problem] The invention provides monomolecular film that is formed from molecules comprising a structural component (B) which is hydrophobic and/or lipophobic, and a structural component (A) which decomposes when irradiated with UV light having a wavelength in the range 254-400 nm to cleave away a part of the molecule comprising the structural component (B) leaving a residual hydrophilic structural component (C). Further, the invention provides a method of forming a film pattern comprising; at least a step of ejecting a droplet, which includes a compound represented as the following Formula (0), on a solid-phase surface having a functional moiety; [Formula 0] X-Y-Z€ƒ€ƒ€ƒ(0) Where, X represents a structure having reactivity to a functional moiety which exists at the solid-phase surface, Y represents a decomposable structure by itself and Z represents a structure which is capable of changing solid-state properties on the solid-phase surface or a reactive structure. |
申请公布号 |
EP1610176(A3) |
申请公布日期 |
2009.05.27 |
申请号 |
EP20050009500 |
申请日期 |
2005.04.29 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
FUKUSHIMA, HITOSHI;TAKIGUCHI, HIROSHI;SHIMODA, TATSUYA;MASUDA, TAKASHI;BUSHBY, RICHARD JAMES;EVANS, STEPHAN;JEYADEVAN, J. P.;CRITCHLEY, KEVIN |
分类号 |
G03F7/004;C07D207/40;C07D207/404;G03F7/16 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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