| 摘要 |
This invention provides a method of mounting cylindrical electrodes in the geometry of a miniature electrostatic quadrupole, which can act as a quadrupole mass filter or a quadrupole ion guide, or be used in a linear quadrupole ion trap. The electrodes are mounted in pairs on microfabricated supports, which are formed from conducting parts on an insulating substrate. The supports include a suspended flexure system to relieve strains caused by mismatch between the thermal expansion coefficients of the electrodes and the substrate. A complete quadrupole is constructed from two such supports, which are spaced apart by further conducting spacers. |
