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发明名称
MANUFACTURING METHOD FOR SEMICONDUCTOR CHIPS
摘要
申请公布号
EP1831924(B1)
申请公布日期
2009.05.27
申请号
EP20050822800
申请日期
2005.12.21
申请人
MATSUSHITA ELECTRIC IND CO., LTD.
发明人
ARITA, KIYOSHI;NAKAGAWA, AKIRA
分类号
H01L21/78;H01L21/68;H01L23/544
主分类号
H01L21/78
代理机构
代理人
主权项
地址
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