A grid structure and method for manufacturing the same. The grid is used for gating a stream of charged particles in certain types of particle measurement instruments, such as ion mobility spectrometers and the like. The methods include various microfabrication techniques for etching and/or depositing grid structure materials on a silicon substrate.
申请公布号
EP1756861(A4)
申请公布日期
2009.05.27
申请号
EP20050747617
申请日期
2005.05.06
申请人
STILLWATER SCIENTIFIC INSTRUMENTS;UNIVERSITY OF MAINE
发明人
SMITH, ROSEMARY;COLLINS, SCOTT;FREDERICK, BRIAN, G.;LEGORE, LAWRENCE, J.
