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发明名称
Washing method, Washing apparatus for polycrystalline silicon and method of producing polycrystalline
摘要
申请公布号
EP2039654(A3)
申请公布日期
2009.05.27
申请号
EP20080163534
申请日期
2008.09.02
申请人
MITSUBISHI MATERIALS CORPORATION
发明人
SAKAI, KAZUHIRO
分类号
C01B33/037;C01B33/03
主分类号
C01B33/037
代理机构
代理人
主权项
地址
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