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经营范围
发明名称
APPARATUS FOR PROCESSING A SUBSTRATE
摘要
申请公布号
KR20090052446(A)
申请公布日期
2009.05.26
申请号
KR20070118944
申请日期
2007.11.21
申请人
SEMES CO., LTD.
发明人
PARK, GL HONG
分类号
H01L21/304;H01L21/3063
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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