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发明名称
LOADLOCK CHAMBER FOR CHEMICAL VAPOR DEPOSITION APPARATUS
摘要
申请公布号
KR20090052630(A)
申请公布日期
2009.05.26
申请号
KR20070119236
申请日期
2007.11.21
申请人
SFA ENGINEERING CORP.
发明人
LEE, SANG MUN
分类号
H01L21/205;H01L21/02
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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