发明名称 Method of manufacturing a structure having a projection
摘要 A method of manufacturing a structure is provided. This method include a steps of preparing a first substrate having a projection, forming a first layer on the projection, transferring the first layer to a second substrate, and removing at least apart of the second substrate.
申请公布号 US7538042(B2) 申请公布日期 2009.05.26
申请号 US20050068765 申请日期 2005.03.02
申请人 CANON KABUSHIKI KAISHA 发明人 IMADA AYA;DEN TOHRU
分类号 H01L21/44;B81C1/00;G03F7/00 主分类号 H01L21/44
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