发明名称 Exhaust trap device
摘要 Three exhaust trap units are arranged in series in an exhaust trap device for trapping substances solidified from exhaust gas and exhaust gas paths are formed inside the exhaust trap units. One or more collision plates are placed in each trap unit. The collision plates in each of the two upstream side exhaust trap units are arranged such that a space extending in the axial direction of the exhaust path is present therein without being blocked by any of the collision plates. The collision plates in the downstream side exhaust trap unit are arranged such that such a space is not present. Uneven distribution of the amount of accumulation of solidified substances is suppressed without performing complex control, and outflow of the solidified components to the downstream side of the exhaust trap device can be reliably reduced.
申请公布号 US7537628(B2) 申请公布日期 2009.05.26
申请号 US20060579114 申请日期 2006.10.31
申请人 TOKYO ELECTRON LIMITED 发明人 TSUJI NORIHIKO
分类号 B01D45/00;B01D53/46;B01D8/00;B01D45/08;C23C16/44;H01L21/00;H01L21/205;H01L21/31 主分类号 B01D45/00
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