发明名称 Capacitor structure of semiconductor device and method of fabricating the same
摘要 A semiconductor device having superior capacitance may include interconnections formed on a semiconductor substrate, an interlayer insulation layer on the interconnections and having vias exposing a portion of the top surface of the interconnections, a capacitor which may be on the interlayer insulation layer and having a bottom electrode, a dielectric layer pattern, and a top electrode which may be sequentially stacked, and a pad structure may be connected to the interconnections through the vias. The pad structure may include pads for bonding with external electronic devices and a first upper interconnection connected to the top electrode of the capacitor.
申请公布号 US7538375(B2) 申请公布日期 2009.05.26
申请号 US20070730810 申请日期 2007.04.04
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM YOON-HAE;LEE SEUNG-KOO
分类号 H01L27/108 主分类号 H01L27/108
代理机构 代理人
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