| 摘要 |
A micro-electro-mechanical system (MEMS) mirror device includes (1) a mirror, (2) spring elements coupled to the mirror, (3) a beam coupled to the group of spring elements, (4) a spring coupled to the beam, and (5) a stationary pad coupled to the spring. The spring elements includes (1) a straight section having a first end coupled to the beam structure, and (2) spring sections having (a) first ends coupled to a second end of the straight section and (b) second ends coupled to the mirror.
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