| 摘要 |
When it is determined that an end process flag is not stored in memory, there is a possibility that the recovery operation was not executed normally and the viscosity increased or fixed coating liquid exist in a liquid holding member and liquid flow paths. Therefore, a filling operation for generating stronger fluidization than a normal filling operation is carried out as a filling operation also acting as a restoration operation. That is, a pump is operated at a predetermined rotating speed for a specified time, which is longer than the specified time for the normal filling operation. By this, the viscosity increased coating liquid existing in the liquid holding space and the respective liquid flow paths is re-fluidized to an extent that will not interfere with circulation, and normal filling of the coating liquid is carried out.
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