| 摘要 |
A slight-vibration-suppressing mechanism is attached to a piston rod 6 of an air pressure cylinder that stops the piston at a target position by means of a positioning control. The slight-vibration-suppressing mechanism includes a friction member formed of a pair of sealing members being in contact with the piston rod, and an air cell of compressed air fed to a periphery of the piston rod is formed by means of the friction member. An air flow path to feed and discharge the compressed air to the aforementioned air cell is formed, in which the compressed air generates a sliding friction, which suppresses slight vibration, via the friction member between the piston rod and the aforementioned friction member.
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