发明名称 Method of operating laser light source
摘要 A method of operating a laser light source including a wavelength conversion device in which two wavelength laser beams are input to a nonlinear crystal to output a sum frequency wavelength, according to one embodiment includes inputting only one wavelength laser beam of the two input wavelength laser beams to the nonlinear crystal; measuring scattered light intensity of the one wavelength laser beam by a light sensitive sensor installed on an optical axis of the sum frequency wavelength output beam; and judging a damage state of the nonlinear crystal based on a measurement value obtained of the intensity measurement by the light sensitive sensor.
申请公布号 US7539222(B2) 申请公布日期 2009.05.26
申请号 US20060278637 申请日期 2006.04.04
申请人 ADVANCED MASK INSPECTION TECHNOLOGY INC. 发明人 MATSUKI KAZUTO
分类号 H01S3/10 主分类号 H01S3/10
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