发明名称 |
Method and apparatus for implementing a universal coordinate system for metrology data |
摘要 |
A method includes receiving a metrology report including metrology data collected by a metrology tool, position data associated with the metrology data, and context data associated with the metrology tool. A first coordinate system employed by the metrology tool is determined based on the context data. The position data is transformed from the first coordinate system to a second coordinate system to generate transformed position data. The transformed position data is associated with the metrology data.
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申请公布号 |
US7539552(B2) |
申请公布日期 |
2009.05.26 |
申请号 |
US20060539788 |
申请日期 |
2006.10.09 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
MCINTYRE MICHAEL G.;ZONG ZHUQING;DROZDA-FREEMAN ANDREW;SANKARAN VIJAY |
分类号 |
G06F19/00;G01R31/26;G06F17/50 |
主分类号 |
G06F19/00 |
代理机构 |
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地址 |
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