发明名称 |
ESTRUCTURA DE INTERCONEXION ROBUSTA. |
摘要 |
A structure comprising a layer of copper, a barrier layer, a layer of AlCu, and a pad-limiting layer, wherein the layer of AlCu and barrier layer are interposed between the layer of copper and pad-limiting layer.
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申请公布号 |
ES2320523(T3) |
申请公布日期 |
2009.05.25 |
申请号 |
ES20000931376T |
申请日期 |
2000.05.15 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
EDELSTEIN, DANIEL;MCGAHAY, VINCENT;NYE, HENRY;OTTEY, BRIAN;PRICE, WILLIAM |
分类号 |
H01L23/485;H01L23/52;H01L21/3205;H01L21/60;H01L23/532 |
主分类号 |
H01L23/485 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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