DIFFUSION THINFILM DEPOSITION METHOD AND APPARATUS THE SAME,申请号KR20070118741-传众专利搜索

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发明名称	DIFFUSION THINFILM DEPOSITION METHOD AND APPARATUS THE SAME
摘要
申请公布号	KR20090052174(A)	申请公布日期	2009.05.25
申请号	KR20070118741	申请日期	2007.11.20
申请人	INTELLIGENT SYSTEM INC.	发明人	CHOI, SI YOUNG;BAE, SANG YOUL;CHUNG, SUNG YOUP;CHOI, JUNG HYUN
分类号	C23C14/46;C23C14/34	主分类号	C23C14/46
代理机构		代理人
主权项
地址

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