ELECTROSTATIC CHUCK OF SEMICONDUCTOR MANUFACTURING DEVICE,申请号KR20070118546-传众专利搜索

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发明名称	ELECTROSTATIC CHUCK OF SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号	KR20090052036(A)	申请公布日期	2009.05.25
申请号	KR20070118546	申请日期	2007.11.20
申请人	DONGBU HITEK CO., LTD.	发明人	KANG, JUNG BAE
分类号	H01L21/687	主分类号	H01L21/687
代理机构		代理人
主权项
地址

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