发明名称 SPATIAL LIGHT MODULATOR AND MIRROR ARRAY DEVICE
摘要 <p>The present invention provides a spatial light modulator, comprising: a plurality of mirror elements; a plurality of address electrodes for controlling the movement of each of the mirror elements; and first and second control circuits for generating a voltage in the address electrode, wherein the second control circuit applies a voltage to the address electrode when the mirror element is in a moving state.</p>
申请公布号 WO2009064463(A1) 申请公布日期 2009.05.22
申请号 WO2008US12786 申请日期 2008.11.14
申请人 OLYMPUS CORPORATION;SILICON QUEST KABUSHIKI-KAISHA;ISHII, FUSAO 发明人 ISHII, FUSAO;SUGIMOTO, NAOYA;ARAI, KAZUMA;MAEDA, YOSHIHIRO
分类号 G02B5/08 主分类号 G02B5/08
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