发明名称 |
A METHOD AND A SYSTEM FOR CREATING A REFERENCE IMAGE USING UNKNOWN QUALITY PATTERNS |
摘要 |
A method and a system for preparing a pattern's reference-model to be used for automatic inspection of surface are disclosed. The system according to the present invention is comprised of an imaging device that captured images of plurality of the patters; a dedicated software that uses dedicated algorithms to correct and align the captured images; and a controller operative for collecting the same located and same coincident pixel of each of the images; choosing, according to predetermined criteria, one of the collected pixels; creating a new image with same dimensions as the captured images and locating the chosen pixel in the same place corresponding to the place of the collected pixels in the origin images; repeating the process as defined above for each pixel of the captured images; and providing the new created image as a reference model for inspecting the pattern. |
申请公布号 |
WO2007026360(A3) |
申请公布日期 |
2009.05.22 |
申请号 |
WO2006IL01006 |
申请日期 |
2006.08.30 |
申请人 |
CAMTEK LIMITED;REGENSBURGER, MENACHEM;POSTOLOV, YURI;FLIESWASSER, RONI |
发明人 |
REGENSBURGER, MENACHEM;POSTOLOV, YURI;FLIESWASSER, RONI |
分类号 |
H01L31/00;G01N21/86;G01V8/00;G05B1/00;H01L27/00 |
主分类号 |
H01L31/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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