摘要 |
<p>A laser machining device (1) comprises a laser light source (10), a spatial light modulator (20), a controller (22), a light collection optical system (30), and a shielding member (40). The phase-modulation spatial light modulator (20) receives laser light outputted from the laser light source (10), gives a hologram for phase-modulating the laser light at each of two-dimensionally arranged pixels, and outputs the phase-modulated laser light. The controller (22) causes the spatial light modulator (20) to sequentially give holograms, collects the laser light outputted from the spatial light modulator (20) at M (that is a fixed number) light collection positions by the light collection optical system (30), and selectively disposes N light collection positions out of the M light collection positions in a machining region (91) to machine an object to be machined (90).</p> |
申请人 |
HAMAMATSU PHOTONICS K.K.;MATSUMOTO, NAOYA;INOUE, TAKASHI;FUKUCHI, NORIHIRO;ITO, HARUYASU;TAKIGUCHI, YUU |
发明人 |
MATSUMOTO, NAOYA;INOUE, TAKASHI;FUKUCHI, NORIHIRO;ITO, HARUYASU;TAKIGUCHI, YUU |