LINEAR-FOCUSED BEAM ELLIPSOMETER

摘要

The present invention relates to The present invention relates to an ellipsometer, and more particularly, to a linear focused-beam ellipsometer which linearly focuses a light on a specimen using a cylindrical optical system and then measures variation in polarization state of the reflected light. A light split by the beam splitting part is linearly focused onto a plurality of specimens and variation in polarization state of the reflected light is measured with respect to multiple angles of incidence. Therefore, it is possible to measure a plurality of specimens at the same time.