| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor tester and its control program which grasp a relief amount accurately and corrects an overdrive amount, thereby obtaining a sufficient contact pressure. SOLUTION: In the semiconductor tester, a semiconductor device is made close to a probe card and a probe on the probe card can be brought into contact with the semiconductor device at a given contact pressure. The semiconductor tester includes a calculation means for acquiring the overdrive amount for obtaining the given contact pressure by a relief amount of the probe card wherein its amount is decided by the contact pressure thereof, a relief amount of a probe card holder for holding the probe card wherein its amount is decided by the contact pressure of the probe card, a relief amount of a head of a tester connected to the probe card wherein its amount is decided by the contact pressure of the probe card, and the number of probes coming into contact with the semiconductor device. COPYRIGHT: (C)2009,JPO&INPIT
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