ELECTRON EMISSION ELEMENT, ELECTRON SOURCE, IMAGE DISPLAY DEVICE, AND METHOD OF MANUFACTURING ELECTRON EMISSION ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an electron emission element, an electron source, an image display device and simple manufacturing methods thereof that can implement electron emission featuring a satisfactory electron emission characteristic, a high electron emission point density and a small electron emission fluctuation.

SOLUTION: The method of manufacturing the electron emission element has the steps of forming a film containing an electron emission material on a conductive layer, and heating the conductive layer with the film containing the electron emission material formed in an atmosphere containing hydrogen and hydrocarbon radicals. The total partial pressure of the hydrogen and hydrocarbon radicals in the atmosphere is not less than 2×10-11Pa and not more than 8×10-4Pa.

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