| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of achieving the high-speed operation of a galvanometer. <P>SOLUTION: A laser beam machining method is disclosed which includes the following steps: (a) laser beam is incident on a first movable mirror under the condition that the section of the laser beam at the position of a mask is image-formed on the optical path of the laser beam from the first movable mirror to a second movable mirror; (b) the laser beam emitted from the second movable mirror is incident on a workpiece under the condition that the section of the laser beam at the position of the mask which is image-formed on the optical path of the laser beam from the first movable mirror to the second movable mirror is image-formed on the workpiece; and (c) the processes (a) and (b) are repeated after oscillating the first or second movable mirror. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
