| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a conductive film forming method capable of forming a conductive film by setting a difference in the thickness between a convex part and a concave part to a desired small value by a spray pyrolyzing method for forming the conductive film on a surface of a substrate having concave/convex structure on the surface. <P>SOLUTION: This conductive film forming method is provided for forming the conductive film on the surface of the substrate 25 by the spray pyrolyzing method. The conductive film forming method is performed by spraying a raw material solution including water and alcohol and setting the mixing ratio of the water to 10-30 vol.%, on the surface of the heated substrate 25. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
